We have previously reported a method to produce a high purity and high strength ceramic material with micropores without any pore-forming agent which we named “NPP-3D”. In the present study, we evaluated the adsorption property of NPP-3D vacuum chucks and confirmed that NPP-3D vacuum chuck plates and rolls have a “partial adsorption property”. This permits a variety of work sizes with only a single NPP-3D vacuum chuck plate, and allows flexibility in manufacturing processes using NPP-3D vacuum chuck rolls.
詳細資料はこちらからご覧ください