MgO-based Ceramics with Excellent Corrosion Resistance against Plasma Etching
Kota TSUTSUMI, Shinzo MITOMI, Yuji KASASHIMA, Fumihiko UESUGI
Key words
corrosion resistance, plasma etching, component parts used in a chamber of plasma etching
Abstract
In plasma etching process, materials having higher corrosion resistance are required. We developed an advanced MgO-based ceramics with excellent corrosion resistance and high mechanical characteristics. Further, we also succeeded in lowering electric resistance to the order of 100 ohm centimeter without deterioration of its excellent corrosion resistance.
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