Development of pure tungsten material "S-TUN" by new manufacturing method
Shuichi TERAMOTO, Takuji SHIBUYA
Key words
S-TUN, Tungsten, pure tungsten, plasma, electrical discharge, research facilities, semiconductor manufacturing device parts, liquid crystal manufacturing device parts
Abstract
Our company has reviewed the past tungsten manufacturing method, and developed a pure tungsten material with a new manufacturing method. This paper introduces the development purpose, the differences with the past manufacturing method, the characteristics, and the application of developed new manufacturing method pure tungsten material "S-TUN" in this report.
