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2017  Volume 41 

Adsorption Property of Alumina Porous Ceramics "NPP-3D" for Vacuum Chucks
Ryuichi MASUMOTO, Toshikazu YASUKOCHI
Key words alumina porous ceramics, vacuum, adsorption property

Abstract

We have previously reported a method to produce a high purity and high strength ceramic material with micropores without any pore-forming agent which we named "NPP-3D". In the present study, we evaluated the adsorption property of NPP-3D vacuum chucks and confirmed that NPP-3D vacuum chuck plates and rolls have a "partial adsorption property". This permits a variety of work sizes with only a single NPP-3D vacuum chuck plate, and allows flexibility in manufacturing processes using NPP-3D vacuum chuck rolls.


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