Mechanical technologies are improving every day; for example, precision components are getting smaller and functional films are getting thinner. To cope up with these rapid changes, more precise machines with higher performance abilities are required. Drawbacks associated with conventional vacuum chucks include adsorption marks and the need to change the adsorption plate depending on the size of the workpieces. However, our technology makes it possible to manufacture micro-porous ceramics that are suitable for adsorbing and transferring thin workpieces with a wide range of sizes without deformation.
- Pattern inspections on silicon wafers or films
- Transferring thin films
- Coating or printing machines
- Web handling
- Workpiece retention during processing
- Other various vacuum-adsorption applications